High Vacuum Manual Angle Valve for Precise Control
Features
Manually operated angle valves are an excellent solution when automation is not required, they are frequently used in roughing and high-vacuum forelines and make excellent chamber venting valves. Angle valves are used in applications ranging from semiconductor manufacturing, plasma physics research, to nuclear accelerators.Lifei offers all series angle valves suited for vacuum applications such as high vacuum process processes, high vacuum applications in pumping systems, semiconductor technology and research systems.
Specifications
|
● Body |
:304 S.S.(Other material available upon request) |
|
● Poppet |
:304 S.S.(Other material available upon request) |
|
● Bellows |
:Welded AM-350(option) |
|
● Solenoid |
:Option |
|
● Position indicator |
:Option |
|
● Seal |
:Viton O'ring |
|
● Leak rate |
:2×109std.cc./second |
|
● Pressure range |
:1x10-⁹torr to 760 torr Viton seal bonnet |
● Maximum△ pressure before opening:1.2 Bar
● Operating air pressur:4~6.5 kg/cm²
● Cycles until service :16 to 50~500,000 ●(fullorifice open) :63 to 150~250,000
:200 to larger~application dependent
● Bake-out limitation :150℃ Viton seal bonnet
● Larger or special size available upon request
