CF Chamber
Features
- Ultra-High Vacuum Capability: Designed for pressures as low as 1×10⁻¹³ Torr (≈1.3×10⁻¹³ mbar) or even lower, using metal gaskets for sealing.
- High-Temperature Bakeability: Fully metallic construction allows baking up to 450°C to remove water vapor and other contaminants. Some designs can tolerate short-term exposure to even higher temperatures. They are also compatible with cryogenic temperatures down to -196°C.
- Reliable Metal Seal: Sealing is achieved by pressing a sharp "knife edge" on the flange into a soft copper gasket. This "genderless" design allows any two flanges of the same size to mate together. The gasket is single-use but provides reliable sealing across extreme temperature swings.
Offered in both rotatable and nonrotatable versions with through holes and tapped bolt holes.Metric tapped holes can be ordered as specials.
Application
- Common Materials: Mostly made of 304 or 316L stainless steel. Aluminum versions also exist, but they require aluminum gaskets and have a lower bakeout temperature limit (around 200°C).
Specifications
Blank & Flanges:SS 304 (other material available upon request)
Gaskets:OFHC copper or Viton
Bolt: SS304
Temperature range:-200℃~450℃（OFHC copper）
Vacuum Range:1*10-13 mbar
Torque Rating:CF35 and smaller 220kgf-cm
CF63 and larger 360 kgf-cm
Larger or special size available upon request
